JPH0164848U - - Google Patents
Info
- Publication number
- JPH0164848U JPH0164848U JP1987159884U JP15988487U JPH0164848U JP H0164848 U JPH0164848 U JP H0164848U JP 1987159884 U JP1987159884 U JP 1987159884U JP 15988487 U JP15988487 U JP 15988487U JP H0164848 U JPH0164848 U JP H0164848U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- field lens
- cooling
- turning
- controlling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159884U JPH0164848U (en]) | 1987-10-21 | 1987-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159884U JPH0164848U (en]) | 1987-10-21 | 1987-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0164848U true JPH0164848U (en]) | 1989-04-26 |
Family
ID=31441477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987159884U Pending JPH0164848U (en]) | 1987-10-21 | 1987-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0164848U (en]) |
-
1987
- 1987-10-21 JP JP1987159884U patent/JPH0164848U/ja active Pending